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超臨界乾燥
Wikipedia definition
1. Supercritical dryingSupercritical drying is a process to remove liquid in a precisely controlled way. It is useful in the production of microelectromechanical systems (MEMS), the drying of spices, the production of aerogel, and in the preparation of biological specimens for scanning electron microscopy. As the substance in a liquid body crosses the boundary from liquid to gas (see green arrow in phase diagram), the liquid changes into gas at a finite rate, while the liquid body's volume decreases.
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